November 16, 2004

A retarder includes a birefringent film embedded in an adhesive between two plates. The adhesive is index matched to the birefringent film.

13

November 16, 2004

10/180,779

June 25, 2002

356/491   356/492

B32B   27/00   (20060101)   B32B   7/02   (20060101)   G02B   5/30   (20060101)  

RELATED APPLICATIONS This application claims benefit to the priority date of U.S. Provisional Application 60/303,575 tiled on Jul. 6, 2001.

356/491   356/492   356/493   356/494   356/495   356/498   356/500  

7561278 - Interferometer using integrated retarders to reduce physical volume - Owned by Zygo Corporation (Middlefield, CT) An apparatus includes an interferometer having a polarizing beam splitter to split an input beam into a measurement beam and a reference beam, the measurement beam contacting a measurement object, the reference beam contacting a reference object. The interferometer includes at least one thin retarder on a surface of the interferometer.