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Semiconductor storage device and test system    

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United States Patent6823485   
Link to this pagehttp://www.wikipatents.com/6823485.html
Inventor(s)Muranaka; Masaya (Akishima, JP)
AbstractA memory circuit having a memory cell array in which a plurality of memory cells are provided at intersection points of a plurality of word lines and a plurality of bit line pairs and a peripheral circuit for performing an operation of selecting an address is provided with a computing circuit for generating an address signal for test; a packet decoder for designating the kind of computation to the computing circuit; and an input circuit for supplying a test signal comprising a plurality of bits for designating a test operation to the packet decoder.
   














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Drawing from US Patent 6823485
Semiconductor storage device and test system - US Patent 6823485 Drawing
Semiconductor storage device and test system
Inventor     Muranaka; Masaya (Akishima, JP)
Owner/Assignee     Hitachi, Ltd. (Tokyo, JP); Hitachi ULSI Systems Co., Ltd. (Tokyo, JP)
Patent assignment
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Publication Date     November 23, 2004
Application Number     09/830,362
PAIR File History     Application Data   Transaction History
Image File Wrapper   Patent Term   Fees
Litigation
Filing Date     April 25, 2001
US Classification     714/719 324/73.1 324/765 365/201
Int'l Classification     G11C 029/00 G11C 007/00 G01R 031/26 G01R 031/27
Examiner     Lamarre; Guy J.
Assistant Examiner     Britt; Cynthia
Attorney/Law Firm     Antonelli, Terry, Stout & Kraus, LLP
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USPTO Field of Search     714/718 714/719 714/720 714/721 714/722 714/723 324/73.1 324/765 365/201
Patent Tags     semiconductor storage test
   
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Tanabe
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What is claimed is:

1. A semiconductor memory device comprising:

a memory circuit having a memory cell array in which a plurality of memory cells are provided at intersection points of a plurality of word lines and a plurality of bit line pairs and a peripheral circuit which performs an operation of selecting an address;

an arithmetic circuit which generates an address signal to test said memory circuit;

a first packet decoder which designates the kind of operation to said arithmetic circuit; and

an input and output circuit which supplies a test signal comprising a plurality of bits which designate a testing operation to said first packet decoder.

2. A semiconductor memory device according to claim 1,

wherein said input and output circuit uses a number of bits for a test signal which is smaller than the plurality of bits needed for a memory access to said memory circuit.

3. A semiconductor memory device according to claim 1,

wherein said arithmetic circuit and the packet decoder corresponding to said arithmetic circuit are provided in correspondence with each of an X address signal and a Y address signal and are provided adjacent to circuits which hold the address signals at the time of memory access.

4. A semiconductor memory device according to claim 2, further comprising a packet control circuit which sets an input signal supplied via said input and output circuit as a test signal by a combination of predetermined control signals.

5. A semiconductor memory device according to claim 1, further comprising:

a second packet decoder to control a timing generation circuit; and

a third packet decoder to control a command decoder to decode said command,

wherein an operation control is performed by a command designated by a combination of a plurality of control signals and an address signal, and

wherein said first, second and third packet decoders are connected in parallel to a signal line through which said test signal is transmitted.

6. A semiconductor memory device according to claim 5,

wherein said memory circuit is a synchronous dynamic RAM having four memory banks,

wherein said input and output circuit has a plurality of input/output circuits each inputting/outputting a plurality of data bits corresponding to a unit of memory access,

wherein said test signal comprises four bits, and

wherein four of said plurality of input/output circuits are used as an input circuit to receive a test signal and as an output circuit to output test results corresponding to said four memory banks.

7. A semiconductor memory device according to claim 6, further comprising a packet control circuit which sets an input signal supplied via said input circuit as a test signal by a combination of a clock signal and a control signal.

8. A semiconductor memory device according to claim 7,

wherein a command having a high use frequency of said synchronous dynamic RAM is used as a first format including only a test signal supplied first out of said four-bit test signals,

wherein a command having a use frequency lower than that of said first format out of commands of said synchronous dynamic RAM is used as a second format including a test signal supplied in two cycles out of said four-bit test signals, and

wherein a command to set various registers provided for said synchronous dynamic RAM is used as a third format including a test signal supplied in four cycles out of said four-bit test signals.

9. A semiconductor memory device according to claim 8,

wherein said first format includes a no operation command, a bank active command, a read command, and a write command, and

wherein each of said bank active command, said read command, and said write command has a plurality of address controls performed by using said arithmetic circuit.

10. A semiconductor memory device according to claim 8,

wherein said second format instructs reference to a test signal to be supplied next by using the test signal supplied in the first cycle, decodes the test signal supplied in the second cycle, and generates said plurality of commands.

11. A semiconductor memory device according to claim 8, wherein said third format:

instructs reference to a test signal to be supplied next by using the test signal supplied in the first cycle,

sets the kind of a register by the test signal supplied in the second cycle,

generates a register command by the test signal supplied in the third cycle, and

operates said selected register by a test signal supplied in the fourth cycle.

12. A semiconductor memory device according to claim 8,

wherein said packet control circuit generates a first clock and a second clock obtained by dividing the frequency of said clock signal in half,

wherein said first and third cycles to input said test signal are performed by said first clock, and

wherein said second and fourth cycles to input said test signal are performed by said second clock.

13. A test system for a wafer on which a plurality of memory chips are mounted, comprising:

an intermediate board having a plurality of POGO pins with which one ends of pads related to said test of a plurality of memory chips formed on said wafer come into contact;

a testing board having an electrode coming into electrical contact with the other ends of the plurality of POGO pins provided for said intermediate board, on which a semiconductor integrated circuit device for control to generate various signals for a test on the plurality of memory chips is mounted; and

a central control unit which supplies a test control signal to the semiconductor integrated circuit device for control provided on said testing board,

wherein each of the memory chips comprises a memory circuit, an arithmetic circuit which generates an address signal to test said memory circuit, a packet decoder which designates the kind of operation to said arithmetic circuit, and an input circuit which supplies a test signal comprising a plurality of bits to designate a testing operation to said packet decoder, and

wherein said memory circuit includes a memory cell array in which a plurality of memory cells are provided at intersection points of a plurality of word lines and a plurality of bit lines pairs, and a peripheral circuit to perform an operation selecting an address.

14. A test system according to claim 13,

wherein said intermediate board comes into electrical contact with said test related pads on all of memory chips formed on said wafer, and

wherein a plurality of semiconductor integrated circuit devices for control provided on said testing board are used to conduct a batch probing test on all of memory chips formed on the wafer.
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TECHNICAL FIELD

The present invention relates to a semiconductor memory device and a test system and, mainly, a technique effective for use in a technique of a probing test on a dynamic RAM (Random Access Memory).

BACKGROUND ART

An example of a memory integrated circuit capable of realizing the functions of a timing margin test, a voltage margin test, and detection of abnormal current by built-in functions is disclosed in the publication of Japanese Unexamined Patent Application No. Hei 8(1996)-315598. A memory integrated circuit of the publication has therein a built-in test function (BIST) unit for generating a memory test signal and various control signals, a timing generation circuit and a voltage generation circuit which are controlled by an output signal of the sequence unit, and a current sensor for detecting an abnormal current, in which a current-to-voltage converting circuit and an analog-to-digital converting circuit are connected in series.

In the memory integrated circuit having therein, in addition to the test built-in function unit, timing generation circuit, a voltage generation circuit, a current-to-voltage converting circuit, and a current sensor, the scale of the test circuit occupying the memory integrated circuit is large; and, moreover, since the test circuit is used only at the time of a test, there are problems in that the chip size is enlarged, in terms of storage bits as the inherent function of the memory integrated circuit, and the current consumption is increased. The publication indicates that the problems of the circuit scale and the like are solved by a relative decrease in the test circuit area in association with a finer circuit and an increase in the capacity of the memory. However, it is not realistic to allow a large-scale test circuit, as described above, to be built in a general memory, such as dynamic RAM having storage capacity of about 64 Mbits or 256 Mbits as practically used at present.

The throughput of a probing test on a dynamic RAM or the like is determined by test time per chip and the number of chips (the number of chips simultaneous measured). The number of chips simultaneous measured is, however, under constraints of each of various hardware. For example, the number of bonding pads of a synchronous DRAM (Dynamic RAM) of 64 Mbits is equal to at least 60 to 70 which is the sum of about 54 of external terminals except for NC pins and special pads used for a probing test.

On the other hand, the maximum number of needles of a probe card to be electrically connected to the bonding pads is about 1,000 to 1,500. Accordingly, the maximum number of devices to be measured simultaneously is about 20. When the number of devices to be simultaneously measured increases, the number of generating times of signals, the number of comparators, and the number of power units on the tester side are also increased, thereby raising the price of the tester. Further, it causes problems such that the cost of a multi-needle probe card increases and the life becomes shorter. Consequently, it is not easy to increase the number of devices to be simultaneously measured.

The inventors of the present invention have therefore examined solution of the problems while minimizing the number of needle pads used for a probing test. In association with the increase in the diameter of a wafer in recent years, the number of memory chips obtained is conspicuously increasing. It is estimated that the number of chips to be simultaneously measured has to be increased more and more. As methods of decreasing the number of needle pads at the time of a probing test, reduction in the number of power source needle pads, reduction in the number of data input/output pads, reduction in the number of address input pads, and reduction in the number of clock input pads can be mentioned. The power source pads can be eliminated by connecting the power source in a memory chip except for a pair of VCC and VSS as long as the characteristics can be maintained. If the address input pads and clock input pads are eliminated, however, tests of reading and writing data from/to a memory by designating an address cannot be conducted. A method of designating memory access patterns such as matching patterns by a simple control from the outside and generating them on the inside may be considered. It is, however, estimated that the logic in the chip becomes large and complicated, it causes an increase in chip size and deterioration in yield, and the method does not contribute to reduction in cost as a total.

An object of the invention is, therefore, to provide a semiconductor memory device and a test system capable of conducting a memory test with a simple configuration. Another object of the invention is to provide a semiconductor memory device and a test system capable of conducting a probing test with a smaller number of needle pads. Further another object of the invention is to provide a semiconductor memory device and a test system capable of simultaneously measuring the increased number of chips. The above and other objects and novel features of the invention will become apparent from the description of the specification and the attached drawings.

DISCLOSURE OF THE INVENTION

A representative technique of the present invention disclosed in the specification will be briefly described as follows. A memory circuit having a memory cell array in which a plurality of memory cells are provided at intersection points of a plurality of word lines and a plurality of bit line pairs and a peripheral circuit for performing an operation of selecting an address is provided with: an arithmetic unit which is also called an arithmetic circuit, a computing unit or a computing circuit below for generating an address signal for a test on the memory circuit; a packet decoder for designating the kind of operation on the arithmetic unit; and an input circuit for supplying a test signal comprising a plurality of bits for designating a test operation to the packet decoder.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is a block diagram related to a test circuit of an example of a semiconductor memory device according to the invention;

FIG. 2 is a timing chart showing an example of an input protocol of test signals in the semiconductor memory device according to the invention;

FIG. 3 is a diagram for explaining bit patterns corresponding to the format A of FIG. 2 and their operations;

FIG. 4 is a diagram of the structure of pads of an SDRAM according to the invention as an example;

FIG. 5 is a block diagram showing an example of a test circuit mounted on the SDRAM according to the invention;

FIG. 6 is a circuit diagram showing an example of a packet control PC and a data input buffer DIB of FIG. 5;

FIG. 7 is a circuit diagram showing an example of a packet decoder PDEC in FIG. 5;

FIG. 8 is a circuit diagram showing an example of an arithmetic circuit ALU in FIG. 5;

FIG. 9 is a waveform chart for explaining the operation of the arithmetic circuit ALU in FIG. 8;

FIG. 10 is a schematic layout sketch showing an example of the SDRAM according to the invention;

FIG. 11 is a schematic layout sketch showing an example of the SDRAM according to the invention;

FIG. 12 is a circuit diagram showing a simplified example starting from address input until data output and mainly illustrating a sense amplifier of the SDRAM according to the invention;

FIG. 13 is a general block diagram showing an example of the SDRAM according to the invention; and

FIG. 14 is a schematic sketch for explaining a test system according to the invention.

BEST MODE FOR CARRYING OUT THE INVENTION

The invention will be described in more detail with reference to the attached drawings.

FIG. 1 is a block diagram related to a test circuit of an example of a semiconductor memory device according to the invention. The embodiment is directed to, although not particularly limited, a synchronous dynamic RAM (which may be simply called an SDRAM hereinbelow).

An SDRAM core includes peripheral circuits such as a memory array and an address selection circuit. The SDRAM has, in addition to the above, an X address latch, a Y address counter, a mode register, a timing generator, and a vendor test. By controlling the components by a packet decoder and a pattern generation controlling circuit which construct a test circuit, a probing test is carried out.

In I/O (input/output) terminals provided in correspondence with the SDRAM core, four data input/output terminals DQ0 to DQ3 are used as terminals of input and output signals for test. A pad CKEP used for mode entry in control signals, a clock terminal CLK, and a chip select terminal CS/ are used to receive test signals from the terminals DQ0 to DQ3.

Only a pair of a source voltage terminal VCC for supplying a power and an earth terminal VSS of the circuit are used for a test. A pad VPP (step-up voltage), a pad VBB (substrate back-bias voltage), and pads VDLP, VDLA, VPLT, and VBLR (internal step-down voltage) for monitoring an internal voltage are provided for a probing test. As a result, in the SDRAM of the embodiment, irrespective of the storage capacity of about 64 Mbits as will be described hereinlater, the number of electrodes (pads) used for a test can be decreased to 15.

In the embodiment, test signals of four bits supplied from the data input/output terminals DQ0 to DQ3 are formed as a packet (packet of information), and setting of all of operation controls for testing the SDRAM is realized by a single test signal or a combination of test signals. The test signal is supplied to a packet decoder where the bit pattern is decoded. For example, the pattern generation control circuit generates and supplies an X address signal for selecting a word line to the X address latch, and generates and supplies a Y address for selecting a bit line to the Y address counter.

By combinations of test signals of four bits (one packet), 16 control signals can be generated at the maximum. By combining a part (n) of the control signal and the next packet, (n.times.16) control signals can be generated. Further, by combining unused parts (m) in the above two packets, (m.times.16) control signals can be generated. It is sufficient to generate all of control signals necessary for operations of testing a memory circuit.

To determine whether input signals supplied from the data input/output terminals DQ0 to DQ3 are the test signal or not, the pad CKEP is used. Specifically, by combining this signal CKEP, the clock signal CLK, and the chip select signal CS/, the data input signal in normal operation and a test signal in test operation are discriminated from each other.

With such a configuration, the number of pads necessary for electrical contact at the time of a testing operation is largely reduced to 15 per memory chip. By decreasing the number of contact pads in such a manner, the number of memory chips contacted simultaneously with a conventional probe card can be largely increased. The test time can be substantially largely shortened.

While increasing the number of chips to be measured simultaneously, and while assuring all of testing operations necessary for an operation test on a memory circuit by serially inputting one or a plurality of test signals as a packet, in order to make setting of an operation test at high speed, the following is devised.

The four data input/output terminals DQ0 to DQ3 are also used for outputting a test result. Although not particularly limited, the SDRAM has four memory banks, and a test is conducted by simultaneously operating the four memory banks. The test result generated every memory bank is outputted through the data input/output terminals DQ0 to DQ3. Therefore, test read data of every four memory banks is outputted and compared with an expectation value by an external tester.

Using four bits of signals to conduct a test is very convenient for the SDRAM. From the viewpoint of a testing operation, two bits are insufficient as information for setting a testing operation, as will be described hereinlater. A bit pattern of eight bits is too large, so that a waste occurs, and the number of test terminals increases.

FIG. 2 is a timing chart of an example of an input protocol of test signals in a semiconductor memory device according to the invention.

In the embodiment, although not particularly limited, three formats A to C are prepared. The first format A is constructed by one cycle (one packet) in which an operation command of a high use frequency is set. The second format B is constructed by two cycles (two packets) in which an operation command of a low use frequency is set. The third format is constructed by four cycles (four packets) and is used to set various registers in a memory by combining two second formats.

In the first format A, an input mode of a test signal is designated by the high level of the clock CKEP, the high level of the clock signal CLK, and the low level of the chip select signal CS/. A packet decoder corresponding to the first format A receives a four-bit test signal (first primary signal) RP1 entered as a command itself from the data input/output terminals DQ0 to DQ3, decodes it, and starts operation ST/OP immediately in the second cycle.

In the second format B, similarly, by the high level of the signal CKEP, the high level of the clock signal CLK, and the low level of the chip select signal CS/, an input mode of the test signal is designated. The chip select signal CS/ is set to the low level for two cycles. A packet decoder corresponding to the second format B discriminates that a four-bit signal entered from the data input/output terminals DQ0 to DQ3 as the test signal (first primary signal) RP1 is "OTHR" (refer to the following), receives a four-bit test signal (second primary signal) RP2 entered in the second cycle as a command, decodes the test signal RP2, and starts operation ST/OP in the third cycle.

In the third format C, similarly, by the high level of the signal CKEP, the high level of the clock signal CLK, and the low level of the chip select signal CS/, the input mode of the test signal is designated. The chip select signal CS/ is set to the low level twice each time for two cycles. A packet decoder corresponding to the third format C discriminates that the four-bit test signal (first primary signal) RP1 entered from the data input/output terminals DQ0 to DQ3 is set to "OTHR" (refer to the following), receives the four-bit test signal (second primary signal) RP2 entered in the second cycle as information of a designated register, discriminates that a four-bit test signal (first secondary signal) RS1 entered in the third cycle is set to "REG" (register mode), receives a four-bit test signal (second secondary signal) RS2 entered in the fourth cycle as a command, and performs an operation on the register designated in the second cycle.

In the case of using the test signals (packets) as the primary (first) signals in two cycles and the secondary (latter) signals in two cycles, the configuration of the packet decoders can be made simpler as will be described hereinlater. In other words, by constructing the decoder in two stages in correspondence with the two cycles, the formats B and C can be constructed by similar circuits. The format A can be discriminated from the format B by the combination with the chip select signal CS/. In the format A, a command can be executed from the second cycle.

FIG. 3 is a diagram for explaining bit patterns corresponding to the format A in FIG. 2 and their operations.

To the format A, five commands of NOP (no operation), PRE (precharge), READ (read), WRIT (write), and ACTV (bank active) of a high use frequency in operation commands of an SDRAM are assigned. The READ and WRIT commands are accompanied with a column (Y) address control, and the ACTV command is accompanied with a row (X) address control.

For each of the three commands READ, WRIT, and ACTV, four kinds of address controls are performed. Specifically, in each of the commands READ and WRIT, "0" denotes that the Y address is set to 0, "hold" denotes that the address Y of the current cycle is held, +BL denotes that a value BL set in the register is added to the address Y of the current cycle (Y+BL), and -BL indicates that the value BL set in the register is subtracted from the address Y of the current cycle. In the ACTV command as well, in a manner similar to the above, "0" denotes that the X address is set to "0", "hold" denotes that the address X of the current cycle is held, +XL denotes that a value XL set in the register is added to the address X of the current cycle (Y+BL), and -XL denotes that a value XL set in the register is subtracted from the address X of the current cycle (X-XL).

By the command as described above, 14 bit patterns are used by the test signal (packet) of four bits. To the remaining two bit patterns, the above-described command "OTHR" instructing reference to the next packet and "REG" instructing a register mode are assigned.

In the format B, operation commands having not so high use frequency in the operation commands of the SDRAM, for example, eight commands of PALL (all bank precharge), CBR (automatic refresh), SELF (self refresh), BST (burst stop), PWRDN (power down mode), SELFX (self refresh end), and mode setting such as "auto precharge enable" and "auto precharge mode disable" are assigned. Although the bit patterns of the test signal RP2 with respect to the commands will not be described, 16 commands can be designated at the maximum by the combination with the test signal RP1=OTHR. Consequently, after assigning the above eight commands, eight commands are still available and can be used for setting the kind of a register of the format C.

In the format C, although each of the bit patterns will not be described, in the test signal RP2, any of the operation commands of the SDRAM is used as register setting. For example, setting of a mode register, selection of a bank, setting of a vendor test, or trimming select of VPP, VDLA, or VDLP is assigned. In the secondary test signal RS1, by combination with the test signal RS1 (=RP1) =REG, 16 register operations at the maximum with respect to each of the registers designated by the test signal RP2 can be set.

FIG. 4 is a diagram of the structure of pads of an SDRAM according to the invention as an example. In an SDRAM, pads corresponding to terminals to be connected with external terminals and pads used for a probing test are formed. Pads to be connected to external terminals are mounted on a package of 54 pins including three pairs of power source terminals *VCC and *VSS on both ends and the center of the package and two pairs of *VCCQ and *VSSQ for output circuit. As pads used for the test circuit according to the invention, as shown in FIG. 1, 15 pads are used which are the clock CLK, chip select CS/, data input/output DQ0 to DQ4, power sources VCC and VSS to be connected to the external terminals and, in addition, the substrate potential VBB, word line step-up voltage VPP, peripheral circuit potential VDLP, array potential VDLA, bit line precharge potential VBLR, plate potential VPLT, and mode entry pad CKEP.

That is, out of about 60 pads formed on an SDRAM, electrical contact is made on the 15 pads to conduct an operation test on a memory circuit.

Conversely, electrical contact is not made on the control terminals CKE, RAS/, CAS/, and WE/ and, in addition, the address terminals A0 to A13, the data input/output terminals DQ4 to DQ15, power source terminals VCCQ and VSSQ for output circuit, and mask terminals DQMU and DQML for input/output circuit with a blank in the option-3. By the test signal (packet) entered from the data input/output terminals DQ0 to DQ3, internal signals such as an operation command and an address signal of an SDRAM are generated.

FIG. 5 is a block diagram showing an example of a test circuit to be mounted on the SDRAM according to the invention.

The test circuit includes a plurality of packet decoders provided in correspondence with circuits to be tested. Particularly, when a circuit to be tested is a row address latch XAD-L, as well as a packet decoder PDEC2, an arithmetic circuit ALU2 for generating a row address signal is added. To a column address counter YCNT, as well as a packet decoder PDEC1, an arithmetic circuit ALU1 for generating a column address signal is added.

For the computing circuit ALU2, a sub register s-xreg is provided. By using a configuration such that one of registers xreg and s-xreg is switched and connected to the computing circuit ALU2 and by allowing the sub resister s-xreg to generate a refresh address, switching between a test address and a refresh address can be easily made. It is also possible to use both of the two resisters for a testing operation and perform non-continuous address switching.

For a timing generator, a packet decoder PDEC3 is provided. For mode registers MRG1 and MRG2, packet decoders PDEC4 and PDEC5 are provided, respectively. For a timing generator TREG, a packet decoder PDEC6 is provided. In such a manner, a packet decoder is provided for each of the circuits necessary for a control for the testing operation, and the packet decoders PDEC1 to PDEC6 are connected to a data bus DBUS and a clock bus CBUS, in parallel.

Test signals entered from the data input/output terminals DQ0 to DQ3 are received via a data input buffer DIB and transferred to the data bus DBUS. Each of the packet decoders PDEC1 to PDEC6 therefore receives the entered test signal and, while discriminating whether the test signal is the command assigned to itself or not, executes the command.

A packet control PC receives signals from the mode entry pad CKEP, clock terminal CLK, and chip enable terminal CS/ and transmits a clock signal to the clock bus CBUS. Two out of four lines of the clock bus CBUS are used for clock signals JJB and KKB each obtained by frequency dividing the clock signal to the half. Synchronously with the clock signal JJP, the signals RP1 and RS1 are entered. Synchronously with the clock signal KKB, the signals RP2 and RS2 are entered.

The circuits for a test operation are spread to the circuit blocks necessary to be controlled as in the embodiment and simple circuits such as the packet decoders are provided adjacent to the circuits, thereby enabling gaps and empty spaces between circuit blocks to be utilized from the viewpoint of layout. Consequently, a substantial increase in chip area can be prevented.

FIG. 6 is a circuit diagram showing an example of the packet control PC and the data input buffer DIB in FIG. 5.

The data input buffer DIB has a data latch circuit for latching signals entered from the data input/output terminals DQ0 to DQ3. By the conditions of the low level of the chip select signal CSB (CS/) and the high level of the mode entry pad CKEP, a transfer MOSEET provided at an output section of the data latch circuit is turned on, and the entered signal is sent as a test signal to the data bus DBUS. The data latch circuit is constructed by a transfer gate MOSFET for transmitting an input signal to a serially connected CMOS inverter circuit and a transfer gate MOSFET for feedback which latches the CMOS inverter circuit.

The packet control PC takes the form of a binary counter circuit by using two through latch circuits similar to the above, and is made operative by the CKEP and CSB to perform an operation of frequency-dividing an input clock signal CLK, thereby generating two-phase clock signals JJB and KKB of which cycle is twice as many as that of the clock signal CLK and which are alternately outputted.

FIG. 7 is a circuit diagram showing an example of the packet decoder PDEC in FIG. 5. In the diagram, decoders corresponding to the signals RP1 (RS1) and RP2 (RS2) are shown.

In the decoder corresponding to the format A, the signals READ, WRIT, and ACTV are generated by gate circuits for receiving signals PK2B and PK3B of the upper two bits from packet signals PK0B to PK3B of four bits supplied via the data input buffer DIB. The signals PK0B and PK1B of the lower two bits are decoded by gate circuits (not shown) and four commands (0, hold, + and -) are added to the signals READ, WRIT, and ACTV. An address control as described above using the arithmetic circuit ALU is also added. The commands of the precharge PRE, no operation NOP, other OTHR, and register mode REG are generated by the gate circuits for receiving the four-bit signals PK0B to PK3B. The clock signal JJB is supplied to the gate circuits for generating the commands, and input signals entered in the first and third cycles are decoded.

The signal OTHR is latched by the latch circuit on the basis of the clock signal JJB, and the operations of the gate circuits corresponding to the packet signals PK0B to PK3B are made effective by the signal OTHR and the clock signal KKB subsequently entered. By the gate circuits, signals of the commands PALL, CBR, SELF, BST, PWRDN, SELFX, APEN (auto precharge enable), and APDE (auto precharge disable) corresponding to the format B are generated. The signals APEN and APDE are supplied to a latch circuit constructed by a gate circuit where the auto precharge signal AP is generated.

Although not shown, in correspondence with the format C, a register is designated by combination of the remaining signals RP2, the command REG is generated by the signal RS1 supplied synchronously with the clock signal JJB of the next cycle, and a signal for operating the register is generated by a gate circuit for decoding the packet signals PK0B to PK3B supplied synchronously with KKB.

A plurality of gate circuits as described above are not constructed as one packet decoder. For example, the gate circuit for generating the commands READ and WRIT is included in the packet decoder PDEC1 provided adjacent to the column address counter shown in FIG. 5, and the gate circuit for generating the command ACTV is provided adjacent to the row address latch XAD-L shown in FIG. 5. The circuits for generating the commands are provided so as to be spread in the circuit blocks corresponding to the respective functions. As described above, the packet decoder is constructed by a simple gate circuit. By disposing the packet decoders so as to be spread to circuits to be controlled, gaps and empty spaces between circuit blocks can be utilized from the viewpoint of a layout. Consequently, a substantial increase in chip area can be prevented.

FIG. 8 is a circuit diagram showing an example of the arithmetic circuit ALU in FIG. 5. In the example, a circuit of four bits is illustrated as a representative. The arithmetic circuit ALU in the example is to generate a row (X) address signal and a column (Y) address signal for a testing operation as described above. By limiting the function of the computing circuit ALU to generation of an address, therefore, attempt is made to simplify the circuit.

Specifically, an address signal for the testing operation is sufficiently generated by not only simple increase or decrease in an address such as +1 or -1 but also setting of addresses of a discrete number such as +2 or -2. In the example, the function of adding or subtracting a discrete number such as +4 or -4 is also added. By combining the functions, an address can be designated in a wide range. By adding "clear (0)" and "hold" for holding the preceding state, designation of all of addresses for a testing operation can be achieved.

By limiting the numbers of addition and subtraction to, for example, 1, 2, and 4 as described above, in an actual arithmetic circuit, an arithmetic circuit for each of the lower three bits can be realized by a simple circuit similar to a half adder for inverting a value and generating a carry when both of a value before addition and a value to be added are "1" or inverting the value before addition when it is 0 in an adding operation.

Specifically, two through latch circuits are connected in series, a gate circuit is used as the through latch circuit on the input side and is controlled by a control signal ZERO so that all of outputs of the latch circuit at the front stage are forcedly set to 0. The output signals Q0 to Q3 of the latch circuit on the output side and the like are fed back to the input side and used to control two pairs of transfer gate circuits. The first pair of transfer gate circuits is used to generate an addition output of the bit. With respect to the least significant bit, when both an addition signal AD1 and the output Q0 are "1", "0" is generated, and a carry is generated through the second pair of transfer gate circuits. When either the addition signal AD1 or the output Q0 is "1", the original values are used.

An adding operation is performed by operating the two latch circuits by a control signal PLUS to thereby generate the addition signal. A subtracting operation is realized by controlling the second pair of transfer gate circuits by a control signal MINUS to generate complement numbers such as the outputs Q0 to Q3, and adding addition signals AB2 and AB4. When a control signal HOLD becomes effective, control signals LS/ and LS of the latch circuit on the rear side are generated, and unchanged signals of the latch circuit on the front side are received as they are.

In the example, as a precondition, a simplified circuit as described above is used as the arithmetic circuit, and only one of the addition signals AB1, AB2, and AB4 becomes "1". The result of computation when an addition signal of 2 or larger is set to 1 by mistake is not therefore guaranteed. Although it is imperfect as a computing circuit, when the use is limited to generation of an address signal for a testing operation, the drawbacks are not so considered since the test circuit is used by a semiconductor manufacturer who knows the function very well. It is unnecessary to consider the case where the circuit is erroneously used.

FIG. 9 is a waveform chart for explaining an example of the operation of the arithmetic circuit.

When the control signal ZERO goes high, an output of the NOR gate circuit in the latch circuit on the front side in the computing circuit becomes 0, the clock signals LS and LS/ are generated and latched by the latch circuit on the output side, and all of the address signals become 0.

When the addition signal AB1 is set to the high level (1), an output node X0 of the first pair of transfer gate circuits becomes 1. When the control signal PLUS goes high, the clock signals LS and LT are generated, and an output node Y0 of the latch circuit on the front side becomes 1 in correspondence with 1 of the output node X0. When the control signal PULS goes low, the clock signal LS also changes, and an output signal Z0 (Q0) of the latch circuit at the rear side changes to 1. By the change in the output signal Z0, the two transfer gate circuits are switched, the output node X0 is changed to the low level "0" and the next bit X1 is changed to "1". Subsequently, when the control signal PLUS is set to the high level, the clock signals LS and LT are generated in a manner similar to the above, and the output node Y0 of the latch circuit on the front side is changed to "0", and the output node Y1 is changed to "1". When the control signal PULS goes low, the clock signal LS also changes, and the output signal Z0 (Q0) of the latch circuit on the back side is changed to 0, and the output signal Z1 (Q1) is changed to 1. In such a manner, the address signal increases by +1 each time. The addition signal AB1 is returned to the low level for the next operation.

When the control signal HOLD goes high, only the clock signal LS is generated, signals from the output nodes Y0 to Y3 and the like of the latch circuit on the front side are supplied to the latch circuit on the back side. Since the previous state is received as it is, no change occurs in outputs Z0 to Z3 (Q0 to Q3) and the like.

When the addition signal AB2 is set to the high level, in the second bit, the output node X1 is changed to the low level "0", and the next bit X2 is changed to "1". Subsequently, when the control signal PLUS is set to the high level, in a manner similar to the above, the output node Y1 in the latch circuit at the front side changes to 0, and the output node Y2 changes to 1. When the control signal PULS goes low, the clock signal LS also change, the output signal Z1 (Q1) of the latch circuit on the back side changes to 0, the output signal Z2 (Q2) changes to 1, and addition of +2 is executed.

When the addition signal AB2 goes low and the addition signal AB1 goes high, the output node X0 changes to the high level. When the control signal MINUS is set to the high level, the outputs Z0 to Z2 (Q0 to Q2) of the lower three bits are inverted, complement numbers are generated, and +1 of the AB1 is added. Consequently, the result of subtraction of -1 is derived. When the addition signal AB1 goes low, the addition signal AB2 goes high, and the control signal MINUS goes high, the outputs Z0 to Z2 (Q0 to Q2) of the lower three bits are inverted, a complement number is generated, +2 of the addition signal AB2 is added, and the result of subtraction of -2 is generated. Similarly, when the control signal HOLD is set to the high level, the result of calculation is maintained. When the control signal ZERO is generated, all of the outputs Z0 to Z3 and the like are cleared to 0.

For example, when an address step is set to +3, it can be realized by performing two cycles of +1 and +2, or two cycles of +4 and -1. The address step operation except for .+-.1, .+-.2, and .+-.4 can be arbitrarily set by the combination. An address can be generated in the testing operation by a relatively simple pattern. It can sufficiently correspond to the limited computing function as described above.

FIG. 10 is a schematic layout sketch showing an example of the SDRAM according to the invention. Each circuit block in the diagram is formed on a single semiconductor substrate made of single crystal silicon or the like by a known technique of fabricating a semiconductor integrated circuit. The circuits in the diagram are drawn almost in accordance with a geometrical arrangement on the semiconductor substrate. In the embodiment, a memory array is divided into four pieces and memory banks Bank0 to Bank3 are formed.

The memory banks 0 to 3 are disposed in correspondence with the memory array divided into four pieces of two pieces each in the upper and lower sides and two pieces each in the right and left sides. In the center portion in the longitudinal direction of the chip, peripheral circuits including an address input circuit, and a data input/output circuit, and a line of bonding pads are provided. In the peripheral circuits, to rationalize the layout of the circuits which take the form of random logic circuits, the random logic circuits and bonding pads are disposed in parallel to each other.

In the example, the peripheral circuits and the bonding pad line are arranged in parallel to each other. In the configuration, the bonding pad line is disposed in a position deviated from the center line in the longitudinal direction of the semiconductor chip. As a result, in the center portion in the longitudinal direction of the semiconductor