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Semiconductor integrated circuit device
   
Document Number
US Patent 6882008
Issued Date
April 19, 2005
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Abstract
A semiconductor integrated circuit device comprises a semiconductor substrate; an insulating layer formed on the semiconductor substrate; a semiconductor layer insulated from the semiconductor substrate by the insulating layer; source regions of a first conduction type and drain regions of the first conduction type both formed in the semiconductor layer; body regions of a second conduction type formed in the semiconductor layer between the source regions and the drain regions to store data by accumulating or releasing an electric charge; word lines formed on the body regions in electrical isolation from the body regions to extend in a first direction; bit lines connected to the drain regions and extending in a direction different from the first direction; and buried wirings formed in the insulating layer in electrical isolation from the semiconductor substrate and the semiconductor layer, said buried wirings extending in parallel with the bit lines.
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Semiconductor integrated circuit device - US Patent 6882008 Drawing
Drawing from US Patent 6882008
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Number of Claims:
13
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Published
April 19, 2005
Application Number
10/779,621
Filed
February 18, 2004
US Classification
257/347   257/313 257/314 257/348 257/E27.112 257/E29.275
Int'l Classification
H01L   21/70   (20060101)   H01L   29/66   (20060101)   H01L   27/01   (20060101)   H01L   21/02   (20060101)   H01L   21/3205   (20060101)   H01L   21/8242   (20060101)   H01L   27/108   (20060101)   H01L   29/786   (20060101)  
Examiner
Assistant Examiner
Priority Data
Oct 30, 2003 [JP] 2003-370696
USPTO Field of Search
257/313   257/314   257/347   257/348  
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