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Online material consumption monitoring system and method for monitoring material within a wafer fabrication facility
   
Document Number
US Patent 6909996
Issued Date
June 21, 2005
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Abstract
An online monitoring system is provided having a computer having a GUI having a build of material display; a material warehouse in communication with a manufacturing execution system ("MES") for controlling execution of a plurality of recipes used to make an associated product; a capacity consumption system ("CCS") for determining future processing capacity within a wafer fabrication facility in accordance with a total material consumption algorithm. A method of use having the steps of: providing a representative material for consumption within a fabrication facility; calculating a total amount of the representative material consumed within a wafer fabrication facility in accordance with a material consumption algorithm, wherein the material consumption algorithm is calculated using a plurality of variables; and benchmarking material usage by each piece of fabrication equipment disposed within one or a plurality of fabrication facilities to help plan for future material usage and to improve fabrication production.
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Number of Claims:
20
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Published
June 21, 2005
Application Number
10/387,071
Filed
March 12, 2003
US Classification
702/188   702/179 702/183 702/186
Int'l Classification
G06F   11/00   (20060101)   G06F   11/34   (20060101)   G06F   15/00   (20060101)  
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Assistant Examiner
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USPTO Field of Search
700/106   700/108   700/115   700/116   700/121   700/122   702/67   702/69   702/104   702/117   702/134   702/176   438/9   716/4  
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