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Control system and control unit
   
Document Number
US Patent 6911628
Issued Date
June 28, 2005
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Abstract
A control unit, which divides a controlled system into a plurality of zones and carries out control of the individual zones separately, can match the timings for the zones to reach a steady-state reference temperature by basic control. It can effectively reduce overshoot and undershoot after reaching the steady-state reference temperature, and suitably control the temperature of a wafer in the fabrication process of semiconductor devices.
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Number of Claims:
11
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Published
June 28, 2005
Application Number
10/626,543
Filed
July 25, 2003
US Classification
219/486   219/483 219/497 219/506 392/416
Int'l Classification
G05B   11/42   (20060101)   G05B   5/00   (20060101)   G05B   5/01   (20060101)   G05B   11/32   (20060101)  
Examiner
Parent Case
This application is a continuation of International Application No. PCT/JP01/08240, filed Sep. 21, 2001.
Priority Data
Jan 25, 2001 [JP] 2001-17480
USPTO Field of Search
219/483   219/484   219/485   219/486   219/501   219/506   219/483   219/484   219/485   219/486   219/497   219/492   392/416   392/418   438/799  
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Description
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