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Document Number
US Patent 6918938
Issued Date
July 19, 2005
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Abstract
A polishing composition comprising an abrasive, an acid and/or a salt thereof, and water, wherein copper (Cu) is contained in an amount of 1 mg or less per kg of the polishing composition; a process for reducing a surface defect of a substrate comprising applying to a substrate or a polishing pad a polishing composition comprising an abrasive, an acid and/or a salt thereof, and water, wherein copper (Cu) is contained in an amount of 1 mg or less per kg of the polishing composition fed to the substrate or the polishing pad; and a process for manufacturing a substrate comprising a polishing step comprising applying to a substrate or a polishing pad the above polishing composition. The polishing composition of the present invention is used for polishing a substrate for precision parts such as substrates for magnetic recording media such as magnetic disks, optical disks, opto-magnetic disks, and the like; photomask substrates, optical lenses, optical mirrors, optical prisms and semiconductor substrates, concretely polishing a substrate for memory hard disks, and especially finish polishing.
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Number of Claims:
11
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Owner
Kao Corporation (Tokyo,JP)
Published
July 19, 2005
Application Number
10/689,085
Filed
October 21, 2003
US Classification
51/307   106/3 216/96 51/308 51/309 510/165 510/167 510/369
Int'l Classification
C09G   1/02   (20060101)   C09G   1/00   (20060101)  
Priority Data
Oct 30, 2002 [JP] 2002-316224
USPTO Field of Search
51/307   51/308   51/309   106/3   438/692   438/693   252/79.1   252/79.2   510/369   510/165   510/167   216/96  
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