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Semiconductor device and fabricating method thereof
   
Document Number
US Patent 6919246
Issued Date
July 19, 2005
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Abstract
A semiconductor device and method for fabricating the same. The semiconductor device comprises a capacitor including a semiconductor substrate having a first conductive type well; a first trench formed in the semiconductor substrate; a plate electrode formed on the first trench; a capacitor insulating film formed on the plate electrode; and a storage node electrode formed in the first trench. The transistor includes a first insulating film for planarization formed on the storage node electrode; a second trench formed in the portion of the first conductive type well, which does not correspond to the first trench; a gate insulating film formed on the second trench; a gate electrode formed on the portion of the gate insulating film, located on the second trench; and drain and source regions formed on the upper and lower portions of the first conductive type well, respectively, which corresponds to the sidewall of the second trench.
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Number of Claims:
5
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Published
July 19, 2005
Application Number
10/325,381
Filed
December 20, 2002
US Classification
438/243   257/301 257/E21.396 257/E21.651 257/E27.093 257/E29.346 438/212
Int'l Classification
H01L   21/70   (20060101)   H01L   21/8242   (20060101)   H01L   27/108   (20060101)  
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Priority Data
Dec 24, 2001 [KR] 10-2001-0084008
USPTO Field of Search
438/243   438/212   257/300   257/301   257/302  
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