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Method of sorting carbon nanotubes including protecting metallic nanotubes and removing the semiconducting nanotubes
   
Document Number
US Patent 6921684
Issued Date
July 26, 2005
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Abstract
A method for sorting nanotubes and forming devices based upon selective nanotube types is provided. The disclosure provides methods of sorting semiconducting nanotubes useful in the formation of field effect transistors, diodes, and resistors. The disclosure also provides methods of sorting metallic nanotubes useful in the formation of interconnect devices.
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Number of Claims:
11
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Owner
Intel Corporation (Santa Clara, CA)
Published
July 26, 2005
Application Number
10/688,854
Filed
October 17, 2003
US Classification
438/142   438/159 438/778 438/780 977/734
Int'l Classification
B82B   3/00   (20060101)   C23F   13/02   (20060101)   C01B   31/00   (20060101)   C01B   31/02   (20060101)   C23F   13/00   (20060101)   H01L   51/30   (20060101)   H01L   51/05   (20060101)  
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USPTO Field of Search
438/142   438/159   438/778   438/780   257/213   977/DIG.1  
Related Patents
7250366 - Carbon nanotubes with controlled diameter, length, and metallic contacts - Owned by Intel Corporation (Santa Clara, CA)

Some embodiments of the present invention include fabricating carbon nanotube bundles with controlled length, diameter, and metallic contacts.

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Description
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