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Metal-insulator-metal capacitor
   
Document Number
US Patent 6927440
Issued Date
August 9, 2005
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Inventors
Greco; Nancy Anne (Lagrangeville, NY)
Kocis; Joseph Thomas (Pleasant Valley, NY)
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Abstract
An interconnection wiring system incorporating two levels of interconnection wiring separated by a first dielectric, a capacitor formed by a second dielectric, a bottom electrode of the lower interconnection wiring or a via and a top electrode of the upper interconnection wiring or a separate metal layer. The invention overcomes the problem of leakage current and of substrate stray capacitance by positioning the capacitor between two levels of interconnection wiring.
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Number of Claims:
4
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Published
August 9, 2005
Application Number
10/658,036
Filed
September 9, 2003
US Classification
257/296   257/532 257/E21.008 257/E21.575
Int'l Classification
H01L   23/522   (20060101)   H01L   23/52   (20060101)   H01L   21/70   (20060101)   H01L   21/02   (20060101)   H01L   21/768   (20060101)  
Assistant Examiner
Parent Case
RELATED APPLICATION This application is a divisional of U.S. application Ser. No. 09/318,867, filed May 26, 1999, now U.S. Pat. No. 6,635,527 which is a divisional of U.S. application Ser. No. 08/626,310, filed Apr. 1, 1996 now U.S. Pat. No. 5,926,359.
USPTO Field of Search
257/68   257/71   257/288   257/296   257/301   257/303   257/304   257/306   257/310   257/311   257/528   257/532   438/393   438/396  
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