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Document Number
US Patent 6929851
Issued Date
August 16, 2005
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Abstract
Method for removing a portion of the binder phase from the surface of a substrate that is composed of particles of at least a first phase joined together by the binder phase, and wherein the surface is etched by contacting it with a gas flow of an etchant gas and a second gas. The second gas is one or more gases that will not react with the substrate or the removed binder phase and will not alter the oxidation state of the substrate during etching.
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Number of Claims:
14
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Owner
TDY Industries, Inc. (Pittsburgh, PA)
Published
August 16, 2005
Application Number
09/627,801
Filed
July 28, 2000
US Classification
428/216   428/336 428/469 428/472 428/697 428/698 428/699 51/307 51/309
Int'l Classification
C23C   16/02   (20060101)   C23C   30/00   (20060101)   C23C   16/34   (20060101)   C23C   16/36   (20060101)  
Examiner
Parent Case
This is a divisional application of U.S. Ser. No. 09/095,398, filed Jun. 10, 1998, now U.S. Pat. No. 6,214,247.
USPTO Field of Search
428/698   428/472   428/469   428/336   428/697   428/699   428/408   428/701   428/216   428/702   51/307   51/309  
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