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Document Number
US Patent 6940123
Issued Date
September 6, 2005
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Abstract
In a matrix-shaped configuration of memory transistors, word lines are disposed on a top side of a semiconductor body and are parallel to one another. Bit lines run transversely with respect thereto and are formed by polysilicon strips which are applied on the top side and are isolated from the semiconductor body by barrier layers functioning as diffusion barriers.
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Number of Claims:
7
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Published
September 6, 2005
Application Number
10/713,689
Filed
November 14, 2003
US Classification
257/315   257/14 257/303 257/77 257/E21.679 257/E21.682 438/240 438/931
Int'l Classification
H01L   21/70   (20060101)   H01L   21/8247   (20060101)   H01L   21/8246   (20060101)  
Examiner
Assistant Examiner
Priority Data
Nov 14, 2002 [DE] 102 53 164
USPTO Field of Search
257/14   257/77   257/303   438/240   438/931  
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