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Discharge device and discharge method
   
Document Number
US Patent 6960258
Issued Date
November 1, 2005
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Abstract
By means of a fluid material discharge device of simple construction, a technique for fluid material discharge is provided which has few or no inadequate discharge, high productivity, and which enables easy modification and adjustment of the amount of fluid material discharge. The fluid material discharge device comprises a nozzle for discharge of fluid material and a filament-shape member inserted into the nozzle for use. The filament-shape member has a tip portion AA, which is exposed outside of the nozzle when no pressure is exerted on the tip of the filament-shape member, a portion BB which can be inserted into the nozzle, and a portion CC, on the side of the filament-shape member opposite the tip portion AA, and being bent from the portion BB. The spring structure of the filament-shape member is utilized to discharge fluid material.
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Number of Claims:
9
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Owner
Published
November 1, 2005
Application Number
10/267,667
Filed
October 10, 2002
US Classification
118/200   222/501 401/148
Int'l Classification
B05C   17/005   (20060101)   B05C   5/02   (20060101)   H01L   21/00   (20060101)  
Examiner
Attorney/Law Firm
Priority Data
Nov 09, 2001 [JP] 2001-344083
USPTO Field of Search
118/222   118/200   118/205   118/300   222/501   222/518   401/148  
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