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Multilevel electronic circuit and method of making the same
   
Document Number
US Patent 6967152
Issued Date
November 22, 2005
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Abstract
A method of producing a multi-level electronic device that begins with machining into a sheet of dielectric material from a surface to create a set of first indentations at a first level. Conductive material is then deposited into the first indentations to create a set of first conductive features. The first indentations are then substantially filled with dielectric material. The process is continued by machining again into the sheet of dielectric material from a surface and thereby creating a set of second indentations at a second level. Further conductive material is deposited into the second indentations to create a set of second conductive features.
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Number of Claims:
12
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Owner
MicroConnex Corp. (Snoqualmie, WA)
Published
November 22, 2005
Application Number
10/686,315
Filed
October 15, 2003
US Classification
438/597   438/672
Int'l Classification
H01L   21/02   (20060101)   H01L   21/44   (20060101)  
USPTO Field of Search
29/831   29/846   29/847   29/852   257/734   438/597   438/667   438/668   438/669   438/672   438/678   438/679  
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