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Method making bonding pad
   
Document Number
US Patent 6987057
Issued Date
January 17, 2006
Link
Inventors
Huang; Yimin (Taichung Hsien,TW)
Yew; Tri-Rung (Hsinchu Hsien,TW)
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Abstract
An bonding pad structure has a passivation layer over a copper layer having a pad window to expose a portion of the copper layer, a barrier layer conformal to a profile of the pad window, and an aluminum pad located in the pad window. The metal layer can be an aluminum, aluminum alloy or aluminum dominated layer for providing a better adhesion property between the copper layer and the bonding wire.
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Number of Claims:
14
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Owner
Published
January 17, 2006
Application Number
10/229,443
Filed
August 27, 2002
US Classification
438/612   257/E21.508 257/E23.02 438/613 438/614 438/627 438/643 438/692
Int'l Classification
H01L   21/44   (20060101)  
Examiner
Attorney/Law Firm
Parent Case
CROSS-REFERENCE TO RELATED APPLICATIONS This application is a divisional application of, and claims the priority benefit of, U.S. application Ser. No. 09/864,055 filed on May 23, 2001, now U.S. Pat. No. 6,794,752.
USPTO Field of Search
438/612   438/613   438/614   438/627   438/643   438/653   438/692   438/691   438/697   257/736   257/737   257/738   257/751   257/752   257/762   361/760   361/772   361/779  
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