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Process for manufacturing an array of cells including selection bipolar junction transistors
   
Document Number
US Patent 6989580
Issued Date
January 24, 2006
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Abstract
A process for manufacturing an array of cells, including: implanting, in a body of semiconductor material of a first conductivity type, a common conduction region of the first conductivity type; forming, in the body, above the common conduction region, a plurality of active area regions of a second conductivity type and a first doping level; forming, on top of the body, an insulating layer having first and second openings; implanting first portions of the active area regions through the first openings with a doping agent of the first conductivity type, thereby forming, in the active area regions, second conduction regions of the first conductivity type; implanting second portions of the active area regions through the second openings with a doping agent of the second conductivity type, thereby forming control contact regions of the second conductivity type and a second doping level, higher than the first doping level; forming, on top of the body, a plurality of storage components, each storage component having a terminal connected to a respective second conduction region.
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Number of Claims:
28
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Owner
STMicroelectronics S.r.l. (Agrate Brianza,IT)
Ovonyx, Inc. (Boise, ID)
Published
January 24, 2006
Application Number
10/680,721
Filed
October 7, 2003
US Classification
257/577   257/566 257/E27.004 257/E27.071 257/E29.17
Int'l Classification
H01L   29/70   (20060101)  
Examiner
Assistant Examiner
Priority Data
Oct 08, 2002 [EP] 02425604
USPTO Field of Search
257/565   257/566   257/577   257/539   257/E31.029  
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