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Document Number
US Patent 6992197
Issued Date
January 31, 2006
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Abstract
A novel monomer compound having a lactone moiety of the present invention can be converted into polymers usable as resist materials with excellent properties, etc., and an alcohol compound having a lactone moiety of the invention is useful as a material for the monomer compound. The compounds are represented by the following general formula [1]: ##STR00001## wherein one of R.sup.1 and R.sup.2 represents a hydrogen atom, an acryloyl group, or a methacryloyl group, and the other represents an alkyl group; R.sup.3 and R.sup.4 independently represent a hydrogen atom or an alkyl group; R.sup.5 and R.sup.6 both represent a hydrogen atom or are combined to form a methylene chain that may have an alkyl group; and R.sup.7 and R.sup.8 independently represent a hydrogen atom or a methyl group.
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Number of Claims:
3
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Published
January 31, 2006
Application Number
10/866,600
Filed
June 10, 2004
US Classification
549/305  
Int'l Classification
C07D   307/77   (20060101)  
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Priority Data
Jun 12, 2003 [JP] 2003-167838
USPTO Field of Search
549/305  
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