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Interconnect with multiple layers of conductive material with grain boundary between the layers
   
Document Number
US Patent 7001840
Issued Date
February 21, 2006
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Inventors
You; Lu (San Jose, CA)
Wang; Fei (San Jose, CA)
Okada; Lynne (Sunnyvale, CA)
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Abstract
An interconnect structure is formed with a plurality of layers of a conductive material with a grain boundary between any two adjacent layers of the conductive material. Such grain boundaries between layers of conductive material act as shunt by-pass paths for migration of atoms of the conductive material to minimize migration of atoms of the conductive material along the interface between a dielectric passivation or capping layer and the interconnect structure. When the interconnect structure is a via structure, each of the layers of the conductive material and each of the grain boundary are formed to be perpendicular to a direction of current flow through the via structure. Such grain boundaries formed between the plurality of layers of conductive material in the via structure minimize charge carrier wind-force along the direction of current flow through the via structure to further minimize electromigration failure of the via structure.
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Number of Claims:
14
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Owner
Published
February 21, 2006
Application Number
10/361,332
Filed
February 10, 2003
US Classification
438/652  
Int'l Classification
H01L   21/44   (20060101)  
Examiner
Attorney/Law Firm
USPTO Field of Search
438/629   438/637   438/663   438/660   438/652  
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