A micro electromechanical switchable capacitor is disclosed, comprising a substrate, a bottom electrode, a dielectric layer deposited on at least part of said bottom electrode, a conductive floating electrode deposited on at least part of said dielectric layer, an armature positioned proximate to the floating electrode and a first actuation area in order to stabilize the down state position of the armature. The device may furthermore comprise a second actuation area. The present invention provides shunt switches and series switches with actuation in zones attached to the floating electrode area or with relay actuation.
RELATED APPLICATIONS
This application claims priority to, and hereby incorporates by reference the entire, co-pending U.S. Provisional Application No. 60/410,954 entitled "Switchable Capacitor", filed on Sep. 16, 2002.
