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Particle size distribution measuring method, device, and program for compensating for particle concentration
   
Document Number
US Patent 7002684
Issued Date
February 21, 2006
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Abstract
The present invention provides a particle diameter distribution measuring method, a particle diameter distribution measuring device, and a measuring program which decreases the dependence of the calculation of particle diameter distribution on sample concentration, and can measure with higher precision by setting a concentration correction unique to a specific measuring sample in a particle diameter distribution measuring device. The measuring sample is measured by changing its concentration. Concentration correction constants for correcting detection values of detectors according to the concentration of the sample are found. The detection values of the respective detectors are corrected by using the concentration correction constants, and the particle diameter distribution is measured by using the corrected detection values of the respective detectors.
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Number of Claims:
12
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Owner
Horiba, Ltd. (Kyoto,JP)
Published
February 21, 2006
Application Number
10/623,247
Filed
July 18, 2003
US Classification
356/336   356/338
Int'l Classification
G01N   15/02   (20060101)  
Priority Data
Jul 22, 2002 [JP] 2002-211915
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