February 28, 2006

An apparatus for fixing an eletrode of an electrode of plama polymerization apparatus is provided, which comprises; a nonconductive holder for fixing an electrode by covering an end part of the electrode, a leadline connecting the electrode with a power supply, and a fixing part fixing the holder on a chamber wall.

10

February 28, 2006

10/181,228

November 16, 2001

118/723E  

C23C   16/00   (20060101)  

Nov 16, 2000 [KR] 2000-68026

118/723E   118/723R   118/728   118/729   118/718   118/715   118/725   118/719   156/345.43   156/345.51   156/345.54   156/345.2   156/345.46   156/345.44   156/345.47   156/345.45   216/69.11   204/298.41