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Processes for fabricating conductive patterns using nanolithography as a patterning tool
   
Document Number
US Patent 7005378
Issued Date
February 28, 2006
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Abstract
Nanolithographic deposition of metallic nanostructures using coated tips for use in microelectronics, catalysis, and diagnostics. AFM tips can be coated with metallic precursors and the precursors patterned on substrates. The patterned precursors can be converted to the metallic state with application of heat. High resolution and excellent alignment can be achieved.
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Number of Claims:
54
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Owner
Nanoink, Inc. (Chicago, IL)
Published
February 28, 2006
Application Number
10/647,430
Filed
August 26, 2003
US Classification
438/674   438/626 438/644 438/646 438/647 438/675 438/929
Int'l Classification
H01L   21/44   (20060101)  
Assistant Examiner
Attorney/Law Firm
Parent Case
RELATED APPLICATIONS This application claims benefit to provisional application Ser. No. 60/405,741 to Crocker et al. filed Aug. 26, 2002, and Ser. No. 60/419,781 to Crocker et al. filed Oct. 21, 2002 and incorporated herein by reference in its entirety.
USPTO Field of Search
438/1   438/962   438/49   438/677   438/393   438/394   438/395   438/676   438/678  
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