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Electrical joint forming member and plasma processing apparatus
   
Document Number
US Patent 7008275
Issued Date
March 7, 2006
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Abstract
An electrical joint forming member is held between adjacent conductive members included in a semiconductor device fabricating apparatus to reduce electrical resistance between those conductive members. The electrical joint forming member includes an elastic member made of a titanium sheet (75 .mu.m thick, 2 mm wide) and having a surface covered with an aluminum layer (7 .mu.m thick), the aluminum layer being formed by joining an aluminum sheet to the surface of the titanium sheet by cold-roll bonding.
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Number of Claims:
5
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Owner
Published
March 7, 2006
Application Number
10/951,884
Filed
September 29, 2004
US Classification
439/886   174/363 439/66 439/816 439/887 439/92
Int'l Classification
H01R   13/02   (20060101)  
Examiner
Attorney/Law Firm
Priority Data
Sep 30, 2003 [JP] 2003-341462
USPTO Field of Search
439/92   439/816   439/817   439/840   439/884   439/886   439/887   439/89   439/90   439/91   439/66   174/35R   174/35C   174/35GC  
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