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Differential pressure sensor
   
Document Number
US Patent 7010984
Issued Date
March 14, 2006
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Abstract
The differential pressure sensor is formed of a semiconductor substrate (1) which is thinned out in an inner region into a membrane (2) which may be impinged by pressure on both sides. Measurement resistances (3a to 3d) for detecting the differential pressure (P.sub.1 minus P.sub.2) are formed within the membrane (2), and compensation resistances (4) are formed on the carrier, which are connected to measurement resistances (3). The measurement resistances (3) are connected into a first measurement bridge (6) and the compensation resistances (4a to 4d) into a second measurement bridge (7).
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Number of Claims:
13
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Owner
Grundfos a/s (B{umlaut over (j)}rringbro,
Published
March 14, 2006
Application Number
10/883,941
Filed
July 2, 2004
US Classification
73/716   73/719 73/721
Int'l Classification
G01L   13/02   (20060101)  
Assistant Examiner
Attorney/Law Firm
Priority Data
Jul 03, 2003 [EP] 03015055
USPTO Field of Search
73/700   73/716   73/736   73/719   73/734   73/725   73/727   73/721  
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