A method for predicting bearing failure, wherein the bearing includes an inner race, an outer race, and a plurality of rolling elements between the inner and outer race. The method includes coupling a sensor assembly to the outer race, the sensor assembly including at least one temperature sensor and at least one acoustic sensor, generating a bearing performance model based on an initial signal received from the sensor assembly, receiving a second signal from the sensor assembly, and comparing the second signal to the bearing performance model to predict a bearing failure.

Embodiments of the present invention provide a system and method for continuous flow production of mixed fluids. The mixed fluids can comprise a mixture of different fluids or a mixture of the same fluid having different input properties such as temperature. In general, two streams of fluid of varying temperature are supplied to a mixer. The flow rate of each of the input fluids can be regulated to produce a mixed fluid at a desired flow rate and temperature. As an example, mass flow controllers can regulate the flow rates of a hot and cold stream of de-ionized water to produce a stream of de-ionized water at a desired flow rate and temperature.

Embodiments of the invention provide new fittings and fitting assemblies for tight, leak-proof filter and fluid connections in a pump useful in dispensing fluid onto wafers during a semiconductor manufacturing process. One embodiment of a fitting assembly comprises an o-ring-less low profile fitting and a low profile male threaded locking nut. A manifold of the pump is machined with a female threaded hole for receiving the fitting and the locking nut. The fitting has higher compressibility than the manifold. Initially, as one end of the fitting touches the bottom of the receiving hole, there is a small gap between the end of the fitting and the bottom of the receiving hole. As the fitting is pressed down, the end of the fitting that touches the bottom of the receiving hole begins to deform and fill the small gap, thus creating a tight seal between the fitting and the manifold.

A pump controller and pump controlling method for dispensing a precise amount of low viscosity fluid are provided in which the problems of double dispenses and stuttered dispenses are avoided. In particular, the timing of the valves and motors in the pumping apparatus are adjusted to avoid these problems.