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Method for making thin film devices intended for solar cells or silicon-on-insulator (SOI) applications
   
Document Number
US Patent 7022585
Issued Date
April 4, 2006
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Abstract
In one inventive aspect, a thin film device is manufactured by (a) forming a porous semiconductor layer in the form of a thin film on an original substrate, the formation being immediately followed by (b) separation of the thin film by a lift-off process from the original substrate; (c) transfer of the thin film to a dummy support, the thin film not being attached to the dummy support; (d) fabrication of a device on top of the thin film; and (e) transfer and attachment of said device on said thin film on a foreign substrate.
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Number of Claims:
15
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Published
April 4, 2006
Application Number
10/627,576
Filed
July 24, 2003
US Classification
438/455   257/E21.567 257/E21.57 438/458
Int'l Classification
H01L   21/46   (20060101)  
Examiner
Priority Data
Jul 24, 2002 [EP] 02447146
USPTO Field of Search
438/455   438/458   438/459  
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