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Method of manufacturing of thin based substrate
   
Document Number
US Patent 7049208
Issued Date
May 23, 2006
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Abstract
Embodiments of the invention provide a device with a die and a substrate having a similar coefficient of thermal expansion to that of the die. The substrate may comprise a silicon base layer. Build up layers may be formed on the side of the base layer further from the die.
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Number of Claims:
8
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Owner
Intel Corporation (Santa Clara, CA)
Published
May 23, 2006
Application Number
10/963,489
Filed
October 11, 2004
US Classification
438/459   438/458 438/460
Int'l Classification
H01L   21/46   (20060101)  
Examiner
Attorney/Law Firm
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