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Method of copper/copper surface bonding using a conducting polymer for application in IC chip bonding
   
Document Number
US Patent 7060613
Issued Date
June 13, 2006
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Inventors
Aliyu; Yakub (Cashew Crescent,SG)
Roy; Sudipto (Spring Grove,SG)
Ho; Paul (Cainese,SG)
Yi; Xu (Singapore,SG)
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Abstract
A semiconductor chip having an exposed metal terminating pad thereover, and a separate substrate having a corresponding exposed metal bump thereover are provided. A conducting polymer plug is formed over the exposed metal terminating pad. A conforming interface layer is formed over the conducting polymer plug. The conducting polymer plug of the semiconductor chip is aligned with the corresponding metal bump. The conforming interface layer over the conducting polymer plug is mated with the corresponding metal bump. The conforming interface layer is thermally decomposed, adhering and permanently attaching the conducting polymer plug with the corresponding metal bump. Methods of forming and patterning a nickel carbonyl layer are also disclosed.
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Number of Claims:
4
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Published
June 13, 2006
Application Number
10/988,692
Filed
November 15, 2004
US Classification
438/674  
Int'l Classification
H01L   21/44   (20060101)  
Examiner
Parent Case
This is a division of patent application Ser. No. 10/076,244, filing date Feb. 13, 2002 now U.S. Pat. No. 6,821,888, A Method Of Copper/Copper Surface Bonding Using A Conducting Polymer For Application In IC Chip Bonding, which is a Continuation-In-Part of patent application Ser. No. 09/612,576, filing date Jul. 7, 2000, A Method Of Copper/Copper Surface Bonding Using A Conducting Polymer For Application In IC Chip Bonding, now abandoned, assigned to the same assignee as the present invention, which are herein incorporated by reference in their entirety.
USPTO Field of Search
438/674   438/675   438/669  
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