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Silicon package for piezoelectric device
   
Document Number
US Patent 7061086
Issued Date
June 13, 2006
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Abstract
A hermetic package for electronic components which is made of metallic silicon is disclosed. The package creates a cavity for receiving the electronic component, preferably a piezoelectric device, which provides a evacuated environment in the range of 1.times.10.sup.-5 to 1.times.10.sup.-11 torr. In a first embodiment, the single crystal metallic silicon is p-doped to make it electrically conductive, obviating the need for lead wires which could compromise the hermeticity of the package. Silicon-to-silicon bonding is preferably accomplished using brazing of the cover to the base member using gold indium eutectic alloy at 495.degree. C. A method of making a surface mountable electronic component having an internal hermetic environment is also described.
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Number of Claims:
16
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Published
June 13, 2006
Application Number
10/931,663
Filed
September 1, 2004
US Classification
257/684  
Int'l Classification
H01L   23/06   (20060101)  
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USPTO Field of Search
257/684   257/659   257/415   310/346   310/349  
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