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Transparent oxide semiconductor thin film transistors
   
Document Number
US Patent 7067843
Issued Date
June 27, 2006
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Abstract
Transistors fabricated with transparent oxide semiconductors are provided. The semiconductors are metal oxides deposited without the intentional incorporation of additional doping elements, and enable the fabrication of transparent thin film transistors. The transparent transistors can be used to control pixels in a display, without significantly reducing the active area of the pixels.
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Number of Claims:
11
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Published
June 27, 2006
Application Number
10/669,940
Filed
September 24, 2003
US Classification
257/59   257/E21.411 257/E21.462 257/E21.463 257/E29.296
Int'l Classification
H01L   29/04   (20060101)  
Examiner
USPTO Field of Search
257/59  
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