or
Bookmark and Share
Composition for polishing pad and polishing pad using the same
   
Document Number
US Patent 7077879
Issued Date
July 18, 2006
Link
Map
Abstract
An object of the invention is to provide a polishing pad having the excellent slurry retaining properties and the large removal rate and a composition for a polishing pad which can form such the polishing pad. A composition for polishing pad of the invention is comprising a water-insoluble matrix material containing a crosslinked polymer and a water-soluble particle dispersed in the water-insoluble matrix material. The elongation remaining after breaking is 100% or less when a test piece comprising the water-insoluble matrix material is broken at 80.degree. C. according to JIS K 6251. A polishing pad of the invention is that at least a part of the polishing pad comprises the composition for polishing pad.
Tags:
Description:
Amusing 0%
Clever 0%
Complex 0%
Efficient 0%
Historic 0%
Important 0%
Innovative 0%
Interesting 0%
Practical 0%
Simple 0%
Number of Claims:
10
Comments:
no comments yet
Owner
JSR Corporation (Tokyo,JP)
Published
July 18, 2006
Application Number
10/868,353
Filed
June 16, 2004
US Classification
51/298   451/526 51/299 51/300 51/301 51/302 51/307 523/201 525/54.3 525/54.31 525/54.42 525/63 525/70
Int'l Classification
B24D   11/00   (20060101)  
Examiner
Parent Case
This is a divisional application of U.S. application Ser. No. 09/867,541 filed on May 31, 2001 now U.S. Pat. No. 6,790,883.
Priority Data
May 31, 2000 [JP] 2000-161520
USPTO Field of Search
51/298   51/299   51/300   51/301   51/302   51/307   451/526   525/63   525/70   525/54.3   525/54.31   525/54.42   523/201  
Related Patents
Claims
Description
About| FAQs| Terms & Disclaimer| Link to Us| Contact Us