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Optical apparatus, measurement method, and semiconductor device manufacturing method
   
Document Number
US Patent 7084982
Issued Date
August 1, 2006
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Abstract
An optical apparatus includes an optical device arranged on an optical path extending from a light source to a predetermined position, an optical sensor, and a measuring device which measures an optical characteristic or a change in an optical characteristic of the optical device on the basis of an output from the optical sensor. The optical sensor is arranged outside the optical path and senses light which is emitted from a second light source arranged outside the optical path and is reflected by the optical device.
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Number of Claims:
25
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Published
August 1, 2006
Application Number
10/626,744
Filed
July 25, 2003
US Classification
356/446  
Int'l Classification
G01N   21/47   (20060101)  
Assistant Examiner
Priority Data
Jul 25, 2002 [JP] 2002-216938
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