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Position-control stage system
   
Document Number
US Patent 7091636
Issued Date
August 15, 2006
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Abstract
A position-control stage system is disclosed, which is enhanced in prolusion to turn a turntable relatively to a bed through a bearing and also improved in operating performances including high-speed traveling and high response, even with made as small as allowed in diametral dimension. To this end, a motor includes a primary side having armature windings lying on a circular flat surface of a first retainer member secured to the bed, and a secondary side having a field magnet secured on the turntable. The bearing has an outer race held in place with combination of the bed and the first retainer member, and an inner race held in place with combination of the turntable and a second retainer member.
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Number of Claims:
8
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Published
August 15, 2006
Application Number
11/116,343
Filed
April 28, 2005
US Classification
310/67R   310/156.32 310/156.36 310/268 310/49R 310/90
Int'l Classification
H02K   5/00   (20060101)   H02K   5/173   (20060101)  
Assistant Examiner
Attorney/Law Firm
Priority Data
May 24, 2004 [JP] 2004-153439
USPTO Field of Search
310/12   310/13   310/14   310/49R   310/67R   310/90   310/156.36   310/156.82   310/156.32   310/268  
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