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Resilient polishing pad for chemical mechanical polishing
   
Document Number
US Patent 7101275
Issued Date
September 5, 2006
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Abstract
A resilient, laminated polishing pad for chemical mechanical polishing is disclosed. The polishing pad includes a base layer and a polishing layer bonded by a hot-melt adhesive. The hot-melt adhesive of the present invention provides a Tpeel strength for the polishing pad of at least greater than 40 Newtons at 305 mm/min, reducing pad delamination.
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Number of Claims:
7
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Published
September 5, 2006
Application Number
10/673,002
Filed
September 26, 2003
US Classification
451/533   451/539
Int'l Classification
B24B   33/00   (20060101)  
Examiner
Attorney/Law Firm
USPTO Field of Search
451/533   451/539   428/346   428/412   438/346   438/412  
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