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Phase-changeable memory devices
   
Document Number
US Patent 7105870
Issued Date
September 12, 2006
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Abstract
Phase-changeable memory devices include non-volatile memory cells. Each of these non-volatile memory cells may include a phase-changeable diode on a semiconductor substrate and a phase-changeable memory element having a first terminal electrically coupled to a terminal of the phase-changeable diode. This phase-changeable diode may include a lower electrode pattern on the semiconductor substrate, a first phase-changeable pattern on the lower electrode pattern and a gate switching layer pattern on the first phase-changeable pattern. The phase-changeable memory element includes a second phase-changeable pattern electrically coupled to the terminal of the phase-changeable diode and a memory switching layer pattern on the second phase-changeable pattern. The memory switching layer pattern may include a composite of a titanium layer pattern contacting the phase-changeable memory element and a titanium nitride layer pattern contacting the titanium layer pattern.
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Number of Claims:
12
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Published
September 12, 2006
Application Number
11/145,154
Filed
June 3, 2005
US Classification
257/200   257/E45.002
Int'l Classification
H01L   31/0328   (20060101)  
Examiner
Assistant Examiner
Priority Data
Jun 29, 2004 [KR] 10-2004-0049820
USPTO Field of Search
438/95   257/42   257/200   257/E45.002  
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