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Measuring device and measuring method
   
Document Number
US Patent 7106452
Issued Date
September 12, 2006
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Abstract
A wavefront measuring device is disclosed which is capable of measuring an average wavefront and the retardation of a lens including birefringence. The measuring device includes a light source for emitting a linearly polarized light; a polarization orientation setting member for switching the polarization orientation of the light flux from the light source between at least two orientations; a light synthesizing member for synthesizing the light flux after passing the light fluxes through an object to be measured and a reference surface; an analyzer for switching the polarization orientation so as to pass only the same polarized component as the polarized light incident on the object to be measured; an image pickup member for detecting interference information of the light flux obtained through the analyzer; and a calculating section for calculating the average wavefront and/or the retardation of the object to be measured.
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Number of Claims:
11
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Owner
Published
September 12, 2006
Application Number
09/934,713
Filed
August 23, 2001
US Classification
356/495  
Int'l Classification
G01B   9/02   (20060101)  
Assistant Examiner
Priority Data
Aug 31, 2000 [JP] 2000-263969
USPTO Field of Search
356/495   356/487   356/512   356/513   356/514   356/515   356/FOR113   356/489  
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