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Carbon nanotube sensor and method of producing the same
   
Document Number
US Patent 7112816
Issued Date
September 26, 2006
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Abstract
A carbon nanotube sensor and a method of producing the carbon nanotube sensor are disclosed. The sensor detects small particles and molecules. The sensor includes a gate, a source and a drain positioned on the gate, and a carbon nanotube grown from a catalytic material and extending from one of the source and the drain. The method includes the step of functionalizing an end of the carbon nanotube with a receptor. As such, the carbon nanotube is receptive to the small particles and molecules. The carbon nanotube is driven at a resonance, and the resonance of the carbon nanotube is measured when the end of the carbon nanotube is free of the small particles and the molecules. The method includes monitoring for a change in the resonance to detect the association of the small particles and molecules with the end of the carbon nanotube.
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Number of Claims:
28
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Published
September 26, 2006
Application Number
10/413,621
Filed
April 14, 2003
US Classification
257/24   257/20 257/E29.07 977/748 977/938
Int'l Classification
H01L   29/772   (20060101)  
Examiner
Attorney/Law Firm
Parent Case
RELATED APPLICATIONS This patent application claims priority to and all advantages of U.S. Provisional Patent Application No. 60/319,183, which was filed on Apr. 12, 2002.
USPTO Field of Search
257/E51.04  
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