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System and method for filtering output in mass flow controllers and mass flow meters
   
Document Number
US Patent 7113895
Issued Date
September 26, 2006
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Abstract
Embodiments of the present invention can include the steps of (i) filtering the indicated flow to derive an intermediate filtered indicated flow, (ii) deriving a weighted first derivative of the intermediate filtered indicated flow, and (iii) outputting a filtered indicated flow comprising the sum of the intermediate filtered indicated flow and the weighted first derivative of the intermediate filtered indicated flow. The indicated flow can be filtered using a FIR, an IIR a running average or other filtering scheme.
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Number of Claims:
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Owner
Celerity, Inc. (Austin, TX)
Published
September 26, 2006
Application Number
10/926,860
Filed
August 26, 2004
US Classification
702/190   702/189
Int'l Classification
G06F   19/00   (20060101)  
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Assistant Examiner
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Parent Case
RELATED INFORMATION This application is a continuation of, and claims a benefit of priority under 35 U.S.C. 120 of the filing date of U.S. patent application Ser. No. 10/133,110 by inventor Faisal Tariq entitled "System and Method for Filtering Output in Mass Flow Controllers and Mass Flow Meters" filed on Apr. 26, 2002 now U.S. Pat. No. 6,865,520, which further claims priority under 35 USC 119(e) to provisional patent application No. 60/286,934, entitled "MFC & MFM Output Filter," by Faisal Tariq filed Apr. 27, 2001, each of which is hereby expressly incorporated by reference for all purposes.
USPTO Field of Search
702/189   702/190  
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