Spatial-heterodyne interferometry for transmission (SHIFT) measurements

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United States Patent

7119905

Link to this page

http://www.wikipatents.com/7119905.html

Inventor(s)

Bingham; Philip R. (Knoxville, TN), Hanson; Gregory R. (Clinton, TN), Tobin; Ken W. (Harriman, TN)

Abstract

Systems and methods are described for spatial-heterodyne interferometry for transmission (SHIFT) measurements. A method includes digitally recording a spatially-heterodyned hologram including spatial heterodyne fringes for Fourier analysis using a reference beam, and an object beam that is transmitted through an object that is at least partially translucent; Fourier analyzing the digitally recorded spatially-heterodyned hologram, by shifting an original origin of the digitally recorded spatially-heterodyned hologram to sit on top of a spatial-heterodyne carrier frequency defined by an angle between the reference beam and the object beam, to define an analyzed image; digitally filtering the analyzed image to cut off signals around the original origin to define a result; and performing an inverse Fourier transform on the result.

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Reference	Relevancy	Comments	Reference	Relevancy	Comments
2005/0046857 Bingham et al. Mar,2005	Your vote accepted [0 after 0 votes]		2005/0046858 Hanson et al. Mar,2005	Your vote accepted [0 after 0 votes]
6809845 Kim et al. Oct,2004	Your vote accepted [0 after 0 votes]		2004/0212807 Hanson et al. Oct,2004	Your vote accepted [0 after 0 votes]
2004/0213462 Hanson et al. Oct,2004	Your vote accepted [0 after 0 votes]		2004/0213464 Hanson et al. Oct,2004	Your vote accepted [0 after 0 votes]
2004/0130762 Thomas et al. Jul,2004	Your vote accepted [0 after 0 votes]		2004/0145745 Voelkl Jul,2004	Your vote accepted [0 after 0 votes]
6747771 Thomas et al. Jun,2004	Your vote accepted [0 after 0 votes]		2004/0042015 Price Mar,2004	Your vote accepted [0 after 0 votes]
2004/0042056 Price et al. Mar,2004	Your vote accepted [0 after 0 votes]		2004/0042057 Thomas et al. Mar,2004	Your vote accepted [0 after 0 votes]
2004/0057089 Voelkl Mar,2004	Your vote accepted [0 after 0 votes]		2004/0021871 Psaltis et al. Feb,2004	Your vote accepted [0 after 0 votes]
2003/0227658 Thomas et al. Dec,2003	Your vote accepted [0 after 0 votes]		6597446 Klooster et al. Jul,2003	Your vote accepted [0 after 0 votes]
6525821 Thomas et al. Feb,2003	Your vote accepted [0 after 0 votes]		2003/0016364 Thomas et al. Jan,2003	Your vote accepted [0 after 0 votes]
6262818 Cuche et al. Jul,2001	Your vote accepted [0 after 0 votes]		6078392 Thomas et al. Jun,2000	Your vote accepted [0 after 0 votes]
5995251 Hesselink et al. Nov,1999	Your vote accepted [0 after 0 votes]		5877873 Bashaw et al. Mar,1999	Your vote accepted [0 after 0 votes]
5671042 Sciammarella Sep,1997	Your vote accepted [0 after 0 votes]		5515183 Hashimoto May,1996	Your vote accepted [0 after 0 votes]
5410397 Toeppen Apr,1995	Your vote accepted [0 after 0 votes]		5339152 Horn Aug,1994	Your vote accepted [0 after 0 votes]
5299035 Leith et al. Mar,1994	Your vote accepted [0 after 0 votes]		4812042 Yokokura et al. Mar,1989	Your vote accepted [0 after 0 votes]
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Reference	Relevancy	Comments
Papers by E. Voelkl on Fourier transform analysis of electron holography: E. Voelkl, L.F. Allard, and B. Frost, J. Microscopy 180, pt. 1, Oct., 1995, pp. 39-50. cited by other . Oct,2006	Your vote accepted [0 after 0 votes]
E. Voelkl, L.F. Allard, A. Datye, B. Frost, Ultramicroscopy 58, (1995), pp. 97-103. cited by other . Oct,2006	Your vote accepted [0 after 0 votes]
Edgar Volkl, "Introduction to Electron Holography", pp. 133-138, published by Kluwer Academic/Plenum Publishers, New York, 1999. cited by other . Oct,2006	Your vote accepted [0 after 0 votes]
Jacob et al., "High Resolution Photomask Transmission and Phase Measurement Tool", Metrology, Inspection and Process Control for Microlithography XVI, Proceedings of SPIE vol. 4689, pp. 70-82, 2002. cit- ed by other . Oct,2006	Your vote accepted [0 after 0 votes]
Thomas et al., "Direct to Digital Holography for Semiconductor Wafer Defect Detection and Review", Design, Process Integration, and Characterization for Microelectronics, Proceedings of SPIE vol. 4692, pp. 180-194, 2002. cited by other . Oct,2006	Your vote accepted [0 after 0 votes]
E. Voelkl, L.F. Allard, ICEM-13 (13th International Conference on Electron Microscopy), Jul. 17-22, 1994, Paris, France, Proceedings, p. 287. cited by other . Oct,2006	Your vote accepted [0 after 0 votes]
Volkl, E., et al. "Advanced Electron Holography: A New Algroithm for Image Processing and Standardized Quality Test for the FEG Electron Microscope", Ultramicroscopy 58 (1995) 97-103. cited by other . Oct,2006	Your vote accepted [0 after 0 votes]
Volkl, E., et al., "A Software Package for the Processing and Reconstruction of Electron Holograms", Journal of Microscopy, vol. 180, pt. 1, Oct., 1995, pp. 39-50. cited by other . Oct,2006	Your vote accepted [0 after 0 votes]
Leith, E.N. "Reconstructed Wavefronts and Communication Theory", Journal of Optical Society of America, vol. 52 No. 10, Oct. 1962. cited by other . Oct,2006	Your vote accepted [0 after 0 votes]
Gabor, D., et al., "Microscopy by Reconstructed Wave-Fronts", Research Laboratory, Aug. 1948, pp. 454-487. cited by other . Oct,2006	Your vote accepted [0 after 0 votes]
Leith, E.N., et al., "Wavefront Reconstruction with Continuous-Tone Objects", Journal of the Optical Society of America, vol. 53, No. 12, Dec. 1963. cited by other . Oct,2006	Your vote accepted [0 after 0 votes]
Leith, E.N., et al., "Wavefront Reconstruction with Diffused Illumination and Three Dimensional Objects", Journal of the Optical Society of America, vol. 54, No. 11, Nov. 1964. cited by other . Oct,2006	Your vote accepted [0 after 0 votes]
North, J.C., et al., "Holographic Interferometry", Journal of Applied Physics, vol. 37, No. 2, Feb. 1966. cited by other . Oct,2006	Your vote accepted [0 after 0 votes]
Kujawinska, M., "Digital Fringe Pattern Measurement Techniques", Interferogram Analysis. cited by other . Oct,2006	Your vote accepted [0 after 0 votes]
DeVelis, J.B., et al., "Theory and Applications of Holography", (1967). cited by other . Oct,2006	Your vote accepted [0 after 0 votes]
Jahoda, F.C., et al., "Fractional-Fringe Holographic Plasma Interferometry", Applied Optics, Aug. 1967, vol. 6, No. 8, pp. 1407-1410. cited by other . Oct,2006	Your vote accepted [0 after 0 votes]
Jahoda, F.C., et al., "Holographic Interferometry Cookbook", Los Alamos Scientific Laboratory, Oct. 1972. cited by other . Oct,2006	Your vote accepted [0 after 0 votes]
Rastogi, P.K., "Holographic Interferometry", Optical Science Center, University of Arizona, vol. 68 (1994). cited by other . Oct,2006	Your vote accepted [0 after 0 votes]
Volkl, E., et al., "The Extended Fourier Algorithm. Application in Discrete Optics and Electron Holography", High Temperature Materials Laboratory, Jul. 1994. cited by other. Oct,2006	Your vote accepted [0 after 0 votes]
Edgar Volkl, "Introduction to Electron Holography", pp. 133-138, published by Kluwer Academic/Plenum Publishers, New York, 1999. cited by other . Oct,2006	Your vote accepted [0 after 0 votes]
Jacob et al., "High Resolution Photomask Transmission and Phase Measurement Tool", Metrology, Inspection and Process Control for Microlithography XVI, Proceedings of SPIE vol. 4689, pp. 70-82, 2002. cit- ed by other . Oct,2006	Your vote accepted [0 after 0 votes]
Thomas et al., "Direct to Digital Holography for Semiconductor Wafer Defect Detection and Review", Design, Process Integration, and Characterization for Microelectronics, Proceedings of SPIE vol. 4692, pp. 180-194, 2002. cited by other . Oct,2006	Your vote accepted [0 after 0 votes]
"Phase Contrast Microscopy" Authors unknown, date unknown. cited by other . Oct,2006	Your vote accepted [0 after 0 votes]
Thomas C. E., et al. "Direct to digital holography for high aspect ratio inspection of semiconductor wafers" AIP Conference Proceedings, American Institute of Physics, New York, NY, US, No. 683, Mar. 24, 2003, pp. 254-270. cited by other . Oct,2006	Your vote accepted [0 after 0 votes]
Cuche E., et al. Simultaneous amplitude-contrast and quantitative phase-contrast microscopy by numberical reconstruction of Fresnel off-axis holograms: Applied Optics, Optical Society of America USA, vol. 38, No. 34, Dec. 1, 1999, pp. 6994-7001. cited by other . Oct,2006	Your vote accepted [0 after 0 votes]
Cuche E., et al. "Spatial filtering for zero-order and twin-image elimination in digital off-axis holography" Applied Optics, Optical Society of America USA, vol. 39, No. 23, Aug. 10, 2000, pp. 4070-4075. cited by other . Oct,2006	Your vote accepted [0 after 0 votes]
International Search Report and Written Opinion, PCT/US2004/027749, Feb. 2, 2005. cited by other . Oct,2006	Your vote accepted [0 after 0 votes]
Cuche E., et al. "Digital holography for quantitative phase-contrast imaging" Optical Letter, Optical Society of America, Washington, USA, vol. 24, No. 5, Mar. 1, 1999, pp. 291-293. cited by other . Oct,2006	Your vote accepted [0 after 0 votes]
Schnars U., "Direct phase determination in hologram interferometry with use of digitally recorded holograms" Journal of the Optical Society of America--A, Optical Cociety of America, Washington, US, vol. 11, No. 7, Jul. 1, 1994, pp. 2011-2015. cited by other . Oct,2006	Your vote accepted [0 after 0 votes]
Invention of Holography: D. Gabor, Proc. Roy. Soc. London Ser. A A197, 459 (1949). cited by other . Oct,2006	Your vote accepted [0 after 0 votes]
Invention of Sideband (Hetrodyne) Holography: E. Leith and J. Upatnieks, J. Opt. Soc. Am. 52, 1123 (1962) and J. Opt. Soc. Am. 53 1377 (1963). cit- ed by other . Oct,2006	Your vote accepted [0 after 0 votes]
Mathematical Treatise on Holography: J.B. Develis and G.O. Reynolds, Theory and Application of Holography, Addison-Wesley, Reading, MA, 1967. cited by other . Oct,2006	Your vote accepted [0 after 0 votes]
Holographic Interferometry: L.O. Heflinger, R.F. Wuerker, and R.E. Brooks, J. Appl. Phys. 37, 642 (1966). cited by other . Oct,2006	Your vote accepted [0 after 0 votes]
Discussion of Focused Holography (used for holographic interferometry): F.E. Jahoda, R.A. Jeffries and G.A. Sawyer, Appln. Opt. 6, 1407 (1967). cited by other . Oct,2006	Your vote accepted [0 after 0 votes]
Interferogram Analysis: Digital Fringe Pattern Measurement Techniques, M. Kujawinska, (edited by D.W. Robinson and G.T. Reid), IOP Publishing Ltd., Bristol, England, 1993). cited by other . Oct,2006	Your vote accepted [0 after 0 votes]
Holographic Interferometry: Principles and Methods, K. Creath and T. Kreis (edited by K. Rastogi), Springer-Verlag, New York, New York, 1994. cited by other . Oct,2006	Your vote accepted [0 after 0 votes]
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