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Method to assemble structures from nano-materials
   
Document Number
US Patent 7122461
Issued Date
October 17, 2006
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Abstract
Numerous embodiments of a method to assemble nano-materials on a platform are described. In one embodiment, a nano-material is functionalized with a first bondable group. The functionalized nano-material is disposed on an assembly platform having an electrode to form a first layer. Additional layers of the nano-material may be formed above the first layer to form a semiconductor device. In one embodiment, the nano-material may be a carbon nanotube.
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Number of Claims:
24
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Owner
Intel Corporation (Santa Clara, CA)
Published
October 17, 2006
Application Number
11/056,322
Filed
February 10, 2005
US Classification
438/618   977/788
Int'l Classification
H01L   21/4763   (20060101)  
Assistant Examiner
USPTO Field of Search
438/1   438/3   438/6   438/48   438/52   438/364   438/672   438/745   438/780   438/800   438/149   438/618   438/427   977/788  
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