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Method of forming solder bump with reduced surface defects
   
Document Number
US Patent 7132358
Issued Date
November 7, 2006
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Abstract
A method of forming a solder bump may involve forming a first photoresist pattern on a wafer having a pad. The first photoresist pattern may have an opening that exposes a portion of the pad. A first under bump metallurgy (UBM) layer may be formed on the pad, and a second UBM layer may be formed on the first photoresist pattern. A second photoresist pattern may be formed that exposes the first UBM layer and covers the second UBM layer. A solder bump may be formed in the opening. The second photoresist pattern and the first photoresist pattern may be removed using a stripper, thereby removing the second UBM layer by a lift-off method.
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Number of Claims:
15
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Owner
Published
November 7, 2006
Application Number
10/922,172
Filed
August 20, 2004
US Classification
438/614   438/577 438/951
Int'l Classification
H01L   21/44   (20060101)  
Assistant Examiner
Priority Data
Aug 21, 2003 [KR] 10-2003-0058003
USPTO Field of Search
438/614   438/577   438/951  
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