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Method for fabricating semiconductor components using conductive layer and grooves
   
Document Number
US Patent 7132366
Issued Date
November 7, 2006
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Abstract
A method for fabricating semiconductor components such as printed circuit boards, multi chip modules, chip scale packages, and test carriers is provided. The method includes providing a substrate having a blanket deposited conductive layer thereon. Using a laser machining process, grooves are formed in the conductive layer to define patterns of conductors on the substrate. The conductors can be formed with a desired size and spacing, and can include features such as bond pads, conductive vias, and external ball contacts. In addition, selected conductors can be configured as co-planar ground or voltage traces, for adjusting impedance values in other conductors configured as signal traces.
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Number of Claims:
21
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Owner
Micron Technology (Boise, ID)
Published
November 7, 2006
Application Number
11/216,959
Filed
August 31, 2005
US Classification
438/669   257/E21.305 257/E21.347
Int'l Classification
H01L   21/44   (20060101)  
Attorney/Law Firm
Parent Case
CROSS REFERENCE TO RELATED APPLICATIONS This application is a continuation of Ser. No. 09/420,086 filed Oct. 18, 1999, U.S. Pat. No. 6,979,898, which is a division of Ser. No. 09/110,232, filed Jul. 06, 1998, U.S. Pat. No. 6,107,119.
USPTO Field of Search
438/669  
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