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Document Number
US Patent 7152331
Issued Date
December 26, 2006
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Abstract
A positioning apparatus has a stage, guide elements provided on both ends of the stage, and drive elements which are provided at one of both ends of the stage and move the stage along the guide elements. Like linear guide rails 61A, 61B and linear guide bearings 23A, 23B, two guide elements are provided in an area where a ball screw shaft 52 serving as a drive element is placed. One guide element is provided in an area where a non-drive element is provided.
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Number of Claims:
21
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Owner
NSK Ltd. (Tokyo,JP)
Published
December 26, 2006
Application Number
10/761,330
Filed
January 22, 2004
US Classification
33/1M   33/573
Int'l Classification
G01D   21/00   (20060101)  
Attorney/Law Firm
Priority Data
Jan 22, 2003 [JP] P.2003-013974
USPTO Field of Search
33/1M   33/568   33/573  
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