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Cleaning apparatus having fluid mixing nozzle for manufacturing flat-panel display
   
Document Number
US Patent 7152613
Issued Date
December 26, 2006
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Abstract
Provided is a cleaning apparatus having a fluid mixing nozzle, the cleaning apparatus having a fluid mixing nozzle, the cleaning apparatus for cleaning a glass plate used in the manufacture of a flat-panel display and which mixes a cleaning fluid with a gas and sprays the mixture uniformly on the entire surface of a glass plate, thereby providing superior cleaning effects with a minimum amount of cleaning fluid. The fluid mixing nozzle includes a nozzle in the shape of a rectangle, which mixes a cleaning fluid and a pressured gas and sprays a mixture on the flat-panel display. By tightening the nozzle in a direction of the short axis of the nozzle with use of streamlined structures at a predetermined interval, it is possible to prevent a gap of the nozzle from being elastically deformed. Even with a small amount of cleaning fluid, it is possible for the mixture to be sprayed uniformly on the entire surface of the flat-panel display and for the cleaning effects of a glass plate used in manufacturing the flat-panel display to be improved.
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Number of Claims:
8
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Published
December 26, 2006
Application Number
10/413,556
Filed
April 15, 2003
US Classification
134/102.2  
Int'l Classification
B08B   3/00   (20060101)  
Priority Data
Apr 19, 2002 [KR] 10-2002-0021553
USPTO Field of Search
134/102.2   134/100.1   134/102.1  
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