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Document Number
US Patent 7183590
Issued Date
February 27, 2007
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Abstract
An integrated circuit structure includes providing a semiconductor substrate and forming a trench therein. A thyristor is formed around the trench and within the semiconductor substrate. The thyristor has at least four layers with three P-N junctions therebetween. A gate for the thyristor is formed within the trench. An access transistor is formed on the semiconductor substrate. An interconnect is formed between the thyristor and the access transistor.
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Number of Claims:
10
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Published
February 27, 2007
Application Number
11/422,560
Filed
June 6, 2006
US Classification
257/133   257/E21.389 257/E21.661 257/E27.014 257/E27.098 257/E29.221 257/E29.225
Int'l Classification
H01L   29/74   (20060101)  
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Attorney/Law Firm
Parent Case
CROSS-REFERENCE TO RELATED APPLICATION(S) This is a divisional of application Ser. No. 10/752,357 filed Jan. 5, 2004, now U.S. Pat. No. 7,081,378, which is hereby incorporated by reference thereto.
USPTO Field of Search
257/133   257/120   257/124   257/127   257/E29.211   257/E29.217   257/E29.221  
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