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Depositing an oxide
   
Document Number
US Patent 7192890
Issued Date
March 20, 2007
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Inventors
Kuhn; Markus (Beaverton, OR)
Datta; Suman (Beaverton, OR)
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Abstract
A dielectric deposited on a substrate may be exposed to a salt solution. While exposed to the salt solution, an oxide is deposited on the dielectric.
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Number of Claims:
22
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Owner
Intel Corporation (Santa Clara, CA)
Published
March 20, 2007
Application Number
10/696,204
Filed
October 29, 2003
US Classification
438/778   257/E21.271 257/E23.095 438/782
Int'l Classification
H01L   21/31   (20060101)   H01L   21/469   (20060101)  
Attorney/Law Firm
USPTO Field of Search
438/678   438/778   438/782   438/FOR390   438/FOR395   257/E23.095  
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