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Microfeature devices and methods for manufacturing microfeature devices
   
Document Number
US Patent 7199037
Issued Date
April 3, 2007
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Abstract
Microfeature devices, microfeature workpieces, and methods for manufacturing microfeature devices and microfeature workpieces are disclosed herein. The microfeature workpieces have an integrated circuit, a surface, and a plurality of interconnect elements projecting from the surface and arranged in arrays on the surface. In one embodiment, a method includes forming a coating on the interconnect elements of the microfeature workpiece, producing a layer over the surface of the microfeature workpiece after forming the coating, and removing the coating from at least a portion of the individual interconnect elements. The coating has a surface tension less than a surface tension of the interconnect elements to reduce the extent to which the material in the layer wicks up the interconnect elements and produces a fillet at the base of the individual interconnect elements.
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Number of Claims:
20
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Published
April 3, 2007
Application Number
11/413,682
Filed
April 27, 2006
US Classification
438/614   257/E21.503 257/E21.508 257/E21.511 257/E23.021 438/613
Int'l Classification
H01L   21/44   (20060101)  
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Parent Case
CROSS-REFERENCE TO RELATED APPLICATION This application is a divisional of U.S. patent application Ser. No. 10/867,023, filed Jun. 14, 2004, which is incorporated herein by reference in its entirety. This application is related to U.S. patent application Ser. No. 11/407,435, filed Apr. 20, 2006 entitled "MICROFEATURE DEVICES AND METHODS FOR MANUFACTURING MICROFEATURE DEVICES."
USPTO Field of Search
438/613   438/614  
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