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Multilayer barrier film structure and organic electroluminescent display panel and manufacturing method thereof
 
   
Document Number
US Patent 7208872
Issued Date
April 24, 2007
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Abstract
A multilayer barrier film structure of an organic EL display panel has a multilayered body formed on a surface of a supporting substrate. The multilayered body includes an intermediate film sandwiched between inorganic films. The film structure includes a sealing region provided so as to surround the multilayered body on the surface of the supporting substrate. In a method of manufacturing an organic EL display panel comprising an organic EL device and a supporting substrate, a first inorganic film is formed so as to cover a surface of a supporting substrate, an intermediate film is formed on the first inorganic film, a second inorganic film is formed on the intermediate film, an organic EL device is formed on the second inorganic film, and a perimeter outside the organic EL device is subjected to heating or irradiation, to form a sealing region.
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Number of Claims:
11
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Published
April 24, 2007
Application Number
10/667,885
Filed
September 23, 2003
US Classification
313/512   313/504 313/506 428/690 428/917
Int'l Classification
H05B   33/04   (20060101)  
Examiner
Attorney/Law Firm
Priority Data
Sep 25, 2002 [JP] 2002-279597
USPTO Field of Search
313/512  
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