The invention relates to controlling a semiconductor processing system. Among other things, the invention relates to a run-to-run controller to create virtual modules to control a multi-pass process performed by a multi-chamber tool during the processing of a semiconductor wafer.

A custom host naming mechanism that allows a user to define a custom host name as a virtual name for the hosts in the managed information environment, such as the storage area network, overcomes the shortcomings of the use of a network assigned machine name during a failover operation. The custom host naming mechanism allows the operator to define a mnemonic virtual name for each host in the managed information environment, thereby facilitating failover switching. Further, such secondary hosts may undertake offline, lower priority executing tasks while not in failover mode, and rapidly reconfigure as the failover secondary host should the need arise. Therefore, secondary hosts at a hot site deploy with a mnemonically descriptive name indicative of their status as a secondary host for a corresponding primary host, and further, need not remain idle pending a disaster recovery scenario, but rather are employable for offloading of other, lower priority tasks pending failover response.