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Calibrated pressure sensor
 
   
Document Number
US Patent 7216048
Issued Date
May 8, 2007
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Abstract
A control system coupled to a pressure sensor calibrates the pressure sensor. The control system may measure a plurality of capacitance values at a plurality of corresponding applied voltages to compare the values with a first calibration mechanism generated by sample pressure sensors in a comparison. A final calibration mechanism may be generated by adjusting the first calibration mechanism in response to the comparison. The unknown differential pressure may be applied to a diaphragm of the pressure sensor. A capacitance value at the unknown differential pressure may then be measured. Using the final calibration mechanism, the differential pressure at the measured capacitance value may be retrieved.
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Number of Claims:
11
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Published
May 8, 2007
Application Number
11/027,289
Filed
December 30, 2004
US Classification
702/98  
Int'l Classification
G01L   27/00   (20060101)  
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Assistant Examiner
Attorney/Law Firm
USPTO Field of Search
702/52   702/98  
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