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Bonding member and electrostatic chuck
 
   
Document Number
US Patent 7218502
Issued Date
May 15, 2007
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Abstract
A bonding member is provided, including, a ceramic member having a concave portion, a metal member having a convex portion corresponding to the concave portion of the ceramic member. A first bonding material joins a bottom portion of the concave portion of the ceramic member and a tip portion of the convex portion of the metal member. The first bonding material has a porous structure, including particles and a brazing filler metal, and covers a corner between tip and side portions of the metal member. A second bonding material including a brazing filler metal joins the side portion of the concave portion of the ceramic member and the side portion of the convex portion of the metal member.
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Number of Claims:
11
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Owner
Published
May 15, 2007
Application Number
10/790,259
Filed
March 1, 2004
US Classification
361/234   228/122.1
Int'l Classification
H01L   21/683   (20060101)   B23B   31/02   (20060101)  
Assistant Examiner
Attorney/Law Firm
Priority Data
Mar 07, 2003 [JP] P2003-062040
USPTO Field of Search
361/234   228/122.1   228/126   228/132   228/187   228/230  
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